Paper Title:
Preparation and Property of a Fe-Doped DLC Multilayer by Ion Sources
  Abstract

A novel technique has been successfully developed to grow Fe ion doped diamond-like corbon (DLC) multilayer, with the modified linear ion sources(LIS), on Si(100)substrates. The Fe ions, generated in the specially designed ion source and accompanying the argon ions were implanted into one DLC layer previously grown by pulsed arc ion plating during argon ions sputtering and etching. The Fe-DLC multilayer can be grown by alternating growth of DLC layer and Fe ion implantation. The mechanical properties of Fe-DLC films were characterized. The results show that the Fe ion implanted multilayer significantly improves its mechanical properties. As compared with the conventional DLC films. Its stress drops to 3.9 GPa from 4.5 GPa, its friction coefficient is down to 0.1 from 0.14, and its hardness remains unchanged.

  Info
Periodical
Materials Science Forum (Volumes 654-656)
Main Theme
Edited by
Jian-Feng Nie and Allan Morton
Pages
1908-1911
DOI
10.4028/www.scientific.net/MSF.654-656.1908
Citation
N. Ren, Z.J. Ma, D.C. Zhao, G.J. Xiao, S.H. Wu, "Preparation and Property of a Fe-Doped DLC Multilayer by Ion Sources", Materials Science Forum, Vols. 654-656, pp. 1908-1911, 2010
Online since
June 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Hong Xi Liu, Ye Hua Jiang, Rong Zhou, Zu Lai Li, Bao Yin Tang
Abstract:Microstructure and properties of plasma immersion ion implantation and deposition diamond-like carbon (DLC) films on bearing steel substrate...
990
Authors: Dong Cai Zhao, Geng Jie Xiao, Zhan Ji Ma, Sheng Hu Wu
Abstract:A series of diamond-like carbon (DLC) films with different Si concentration were prepared by changing the ratio of the number of Si-doped...
343
Authors: Xin Chun Chen, Zhi Jian Peng, Zhi Qiang Fu, Cheng Biao Wang
Abstract:A series of graded films of Cr/CrN/ CrNC/CrC/(Cr-DLC)/[(Cr-(Cr-DLC))×10] were deposited on Si(100) wafer and 4135 alloy structural steel...
429
Authors: Xiao Ling, Shu Rong Yu, Jun Yan Zhang
Chapter 1: Materials Science and Engineering
Abstract:Ni-doped diamond-like carbon coatings were deposited on silicon wafer by magnetron sputtering. The Ni content was controlled by changing the...
131
Authors: You Yu Fan, Guang Li, Yuan Xia
Chapter 2: Nanotechnology and Micro/Nano Electro Mechanical Systems
Abstract:Diamond-like carbon (DLC) films have been extensively studied for more than a decade due to their unique combination of properties. The...
523