Paper Title:
Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment
  Abstract

Poly(methyl methacrylate)(PMMA) and Poly L-lactic acid (PLLA) are transparent and they are suitable for optical purposes. The multi-layer polymer microfabrication can be applied for a large displacement actuator and precision sensors. A new method is intruduced to generate the multi-layer polymers microstructures by X-ray lithography with alignment. The function of X-ray on polymer materials are breaking the polymer main chain and generating intermediates which can be degraded further and finally dissolved by the solvent interaction. The method for polymer micromachining by using X-ray lithography with alignment for fabrication multi-layer micro polymer structures is confirmed experimentatively.

  Info
Periodical
Materials Science Forum (Volumes 663-665)
Edited by
Yuan Ming Huang
Pages
1016-1019
DOI
10.4028/www.scientific.net/MSF.663-665.1016
Citation
Y. G. Li, S. Sugiyama, "Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment", Materials Science Forum, Vols. 663-665, pp. 1016-1019, 2011
Online since
November 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jais Bin Lias, Munehiro Kimura, Tadashi Akahane
Abstract:The photoalignment technology for the alignment of liquid crystal molecules has lately gathered much attention because its advantages over...
1752
Authors: Ying Shi, Jin Yun Zhou, Liang Lei, Qing Hua Lin, Xin Xing Wang, Long Hua Mei
Laser Processing Technology
Abstract:There has been many ways of finding out the focal plane of laser projection imaging system. However we use a new aligning way to get the...
1914
Authors: Munir Mohammad, Mohammad Bilal Khan, Zaffar M. Khan, Gabriel Cavalli, Damitha Adhikari, Ravi Silva
Abstract:This work demonstrates the horizontal patterning/alignment of single wall nano tubes (SWNTs) using simple filtration method. In the quest of...
121
Authors: Jin Yang Feng, Feng Chen, Yuan Fang Shang, Xiong Ying Ye
Chapter 8: Packaging Technology
Abstract:In this Paper, we Propose an Alignment Method for Lift-Off on Shallow Grooves in Transparent Substrates without an Extra Mask. An Assistant...
447
Authors: Yan Xu, Wei Chen, Kai Leung Yung
Chapter 4: Material Science and Technology
Abstract:The most apparent advantages of thermoplastics are the recyclability and processibility. To obtain recyclable and injectable conductive...
1117