Paper Title:
Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering
  Abstract

The Al-doped ZnO (AZO) films were deposited on the glass substrates by RF magnetron sputtering at different substrate temperatures. The effect of substrate temperature on the structural, optical, and electrical properties of AZO films was investigated. The results indicate each of the films has a preferential c-axis orientation. The grain size increases with substrate temperature increasing. All the films exhibit a high transmittance in visible region and have sharp ultraviolet absorption characteristics. The resistivity decreases with substrate temperature increasing up to 250oC, then increases for higher temperature.

  Info
Periodical
Materials Science Forum (Volumes 663-665)
Edited by
Yuan Ming Huang
Pages
1293-1297
DOI
10.4028/www.scientific.net/MSF.663-665.1293
Citation
Y. B. Wu, S. Lei, Z. Wang, R. H. Zhao, L. Huang, H. Li, "Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering", Materials Science Forum, Vols. 663-665, pp. 1293-1297, 2011
Online since
November 2010
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