Paper Title:
Thin Metal Films and Multi-Layers Structure as Absorbers for Infrared Detectors
  Abstract

As thin metal films are known to act as wide-band absorbers for infrared radiation, in this paper Ni metal films are prepared on the Ge surface of double-sided polishing, The results showed the absorbing properties of the metal layer are strongly influenced by the dielectric function of the sensor material. This paper also describes one multi-layers structure as absorber. The structure included a reflector layer of 100-nm-thick Ti (e-beam evaporation), 2-µm-thick polyimide(spin-coating), and 14.9-nm-thick Ni film (e-beam evaporation). These contain a half transmissive thin metal film, a total reflective thin metal film and a quarter-wave polyimide film. The results showed that, measured performance matches well with theoretical predictions.

  Info
Periodical
Materials Science Forum (Volumes 663-665)
Edited by
Yuan Ming Huang
Pages
352-355
DOI
10.4028/www.scientific.net/MSF.663-665.352
Citation
H. Liu, L. Song, S. Zhou, C. L. Cai, "Thin Metal Films and Multi-Layers Structure as Absorbers for Infrared Detectors", Materials Science Forum, Vols. 663-665, pp. 352-355, 2011
Online since
November 2010
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Price
$35.00
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