Paper Title:
Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering
  Abstract

Al doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray diffraction and atomic force microscopy show the Al doped Er2O3 films obtained are amorphous and uniform. The optical constants are studied which shows a proper value of refractive index and a lower reflectivity, indicating it could be a usefully material for solar cells.

  Info
Periodical
Materials Science Forum (Volumes 663-665)
Edited by
Yuan Ming Huang
Pages
361-364
DOI
10.4028/www.scientific.net/MSF.663-665.361
Citation
Y. Y. Zhu, Z. B. Fang, "Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering", Materials Science Forum, Vols. 663-665, pp. 361-364, 2011
Online since
November 2010
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