Paper Title:
Study on the Energy Structure of Amorphous Antireflection Er2O3 Films on Si(001) Substrates
  Abstract

Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray photoelectron spectroscopy, x-ray diffraction and atomic force microscopy show the Er2O3 films obtained are stoichiometric, amorphous, and uniform. The electronic structure is studied which shows a large energy gap value of the Er2O3 film, indicating Er2O3 film could be a promising antireflection coating for solar cells.

  Info
Periodical
Materials Science Forum (Volumes 663-665)
Edited by
Yuan Ming Huang
Pages
612-615
DOI
10.4028/www.scientific.net/MSF.663-665.612
Citation
Y. Y. Zhu, Z. B. Fang, T. Ji, Y. S. Liu, "Study on the Energy Structure of Amorphous Antireflection Er2O3 Films on Si(001) Substrates", Materials Science Forum, Vols. 663-665, pp. 612-615, 2011
Online since
November 2010
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$32.00
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