Commercial pure Ti (CP Ti) was subjected to the effects of ECAE processes at 673 K by Bc path. The initial 80~100 μm equiaxed and coarse grains were elongated along the shearing force direction of ECAE and refined to ~300 nm after the eight passes ECAE. Surface roughness of CP Ti samples and contact angle of deionized water on CP Ti surface, with coarse or ultrafine grains, modified by polish and HF treatment have been investigated. It is found that CP Ti substrates with ultrafine grains show a significantly lower water contact angle and higher surface energy compared with coarse-grains. HF treatment on pure Ti surfaces brings higher surface roughness and hydrophobicity than polish treated. These results reveal that the combination of ultrafine grains and higher surface roughness, hydrophobic allows a favorable condition for cell growth and bone generation on the surfaces of pure Ti after ECAE process.