Paper Title:
A Magnetic Microsensor with Temperature Compensation Based on Optical Mechatronic Technology
  Abstract

An optical mechatronic magnetic microsensor with temperature compensation based on fiber Bragg grating (FBG) and microelectromechanical system (MEMS) technologies is demonstrated. Parallel nickel-electroplated cantilever beams are fabricated as an attractive bending mechanism for pushing the optical fiber. Related stress induced cantilever bend caused by magnetic force driving reflective wavelength shift that exactly corresponds with photo-elastic coupling effect to characterize microsensors. Two different cycles of gratings in the same fiber have fabricated to perform the function of magnetic sensing and temperature compensation for reducing temperature-induced bias in magnetic measurement automatically. The sensitivity of 2.238 T/nm with null temperature response has obtained which excited by Nd-Fe-B magnets with residual magnetic strength up to 1.26 Tesla.

  Info
Periodical
Edited by
A.G. Mamalis, M. Enokizono and A. Kladas
Pages
164-170
DOI
10.4028/www.scientific.net/MSF.670.164
Citation
C. C. Lai, I. N. Chang, H. C. Chang, C. C. Hwang, W. F. Liu, C. H. Ma, Y. H. Chen, "A Magnetic Microsensor with Temperature Compensation Based on Optical Mechatronic Technology", Materials Science Forum, Vol. 670, pp. 164-170, 2011
Online since
December 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Dong Weon Lee, Young Soo Choi, Il Kweon Oh
Abstract:This paper describes an integrated tunneling sensor for applications of an electronic nose and a scanning probe microscope. Ultra-thin...
317
Authors: Jian An Lv, Zhen Chuan Yang, Gui Zheng Yan, Yong Cai, Bao Shun Zhang, Kevin J. Chen
Abstract:In this article, integrated AlGaN/GaN cantilevers on (111) silicon substrate are fabricated and characterized. The process started with...
14
Authors: Jian Dong, Heng Jiang, Xi Zeng
I. Materials Science, Engineering and Technology
Abstract:In this work, a SiON film with 25.78% nitrogen contents in film composition was deposited by RF magnetron sputtering. Micro SiON cantilevers...
347
Authors: Kosuke Sato, Kohei Adachi, Hajime Okamoto, Hiroshi Yamaguchi, Tsunenobu Kimoto, Jun Suda
Chapter 4: Processing of SiC
Abstract:We fabricated electrostatically actuated single-crystalline 4H-SiC microcantilever resonators. To realize a narrow gap between cantilevers...
780