Paper Title:
Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure
  Abstract

Piezoelectric micromachined ultrasonic transducers (pMUTs) have been investigated as a promising new approach for ultrasound generation and reception. Most of the reported pMUTs employs a unimorph structure of a micromachined piezoelectric thin film on a silicon membrane. In this paper, a dome-shaped model for piezoelectric micromachined ultrasonic transducer (pMUT) was proposed to replace the conventional unimorph structure. A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model. The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the new model.

  Info
Periodical
Materials Science Forum (Volumes 675-677)
Edited by
Yi Tan and Dongying Ju
Pages
1131-1134
DOI
10.4028/www.scientific.net/MSF.675-677.1131
Citation
J. Peng, C. Chao, H. Tang, "Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure", Materials Science Forum, Vols. 675-677, pp. 1131-1134, 2011
Online since
February 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: M. Mirzaie, G. Rezaei Behbehani
Chapter 10: Biomedical Manufacturing
Abstract:The interaction of myelin basic protein with Nickel ions was studied by Isothermal Titration Calorimetry (ITC) at in tris buffer, pH=7. The...
1963
Authors: Gilles Puel, Chao Liu, Dai Yue Huang
Chapter 14: Ecological Civilization and Low-Carbon Economy
Abstract:This article presents the preliminary results of empirical research on the emerging practices of EcoDesign in the sector of Information...
3688
Authors: Lian Lan Ma, Zhi Chun Liu, Wen Ping Zhang, Hua Yan Chen, Xiao Yun Wu
Chapter 17: Plant Protection and Biotechnology
Abstract:To investigate the efficacy of the compound preparation named KZY-2 which include the effective group formula of anemarrhena asphodeloides...
5569
Authors: Dong Dong Xu, Shao Bo Wu
Chapter 10: Applied Mathematics, Data and Signal Processing, Computational Procedures
Abstract:Term frequency/inverse document frequency (TF-IDF) is widely used in text classification at present, which is borrowed from Information...
2258