A high temperature HRTEM holder equipped with a W-coil heater was used to make insitu observation of high temperature behavior of Al2O3 very thin (about 1 nm in thickness) protective film on AlN particles. The film was used to prevent AlN particles from damages by moisture. Rapid melting and rapid solidification of very small Al2O3 particles of about 2 nm in diameter were found within about 0.2 seconds. Therefore we concluded that the Al2O3 protective film worked as the sintering additives in the high temperature heating process. In the present study, very small Al2O3 particles were identified by the space between observed lattice fringe images. It was found that a tilt boundary was instantaneously formed and annihilated in an Al2O3 particle. There was also evidence that showed the formation and annihilation of edge dislocations within seven seconds during sintering.