Paper Title:
Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM Probe
  Abstract

To confirm the sensitivity in the measurement of electrical properties affected by the nano structure of microwave AFM (M-AFM) probe, three kinds of M-AFM probe with a nano-slit on its tip in different width (75 nm, 120 nm and 160 nm) were investigated. Au and glass samples were measured by the probes working at a non-contact AFM mode. The M-AFM probe with the nano-slit having the width of 75 nm, by which the difference of the measured voltage between Au and glass samples is 55.1 mV, shows the highest sensitivity for detecting electrical properties of materials. As the result illustrated, the M-AFM probe with smaller width nano-slit on the tip can be considered to be an ideal nano structure.

  Info
Periodical
Materials Science Forum (Volumes 675-677)
Edited by
Yi Tan and Dongying Ju
Pages
555-558
DOI
10.4028/www.scientific.net/MSF.675-677.555
Citation
L. Zhang, Y. Ju, A. Hosoi, A. Fujimoto, "Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM Probe", Materials Science Forum, Vols. 675-677, pp. 555-558, 2011
Online since
February 2011
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Price
$32.00
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