Paper Title:
TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching
  Abstract

We have developed a novel abrasive-free planarization method called catalyst-referred etching (CARE). A CARE-processed 8 deg off-axis 4H-SiC (0001) surface is investigated by cross-sectional transmission electron microscopy (TEM). The surface is composed of alternating wide and narrow terraces with single-bilayer-height steps, which are similar to the structure observed on a CARE-processed on-axis 4H-SiC (0001) surface. These results indicate that the structure appears on CARE-processed surfaces regardless of the off-cut angle.

  Info
Periodical
Materials Science Forum (Volumes 679-680)
Edited by
Edouard V. Monakhov, Tamás Hornos and Bengt. G. Svensson
Pages
489-492
DOI
10.4028/www.scientific.net/MSF.679-680.489
Citation
S. Sadakuni, N. X. Dai, Y. Sano, K. Arima, K. Yagi, J. Murata, T. Okamoto, K. Tachibana, K. Yamauchi, "TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching", Materials Science Forum, Vols. 679-680, pp. 489-492, 2011
Online since
March 2011
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$32.00
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