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Authors: Gil Yong Chung, Mark J. Loboda, Jie Zhang, Jian Wei Wan, E.P. Carlson, T.J. Toth, Robert E. Stahlbush, Marek Skowronski, R. Berechman, Siddarth G. Sundaresan, Ranbir Singh
Abstract:Improvements in the quality and consistency of 4H-SiC epitaxy wafers are now starting to enable growth of commercial SiC power device...
123
Authors: Philip Hens, J. Müller, L. Fahlbusch, E. Spiecker, Peter J. Wellmann
Abstract:A new type of void-like structure has been identified in thin 3C-SiC heteroepitaxial layers grown on silicon substrates. Similar surface...
127
Authors: Ruggero Anzalone, Massimo Camarda, Giuseppe D'Arrigo, Christopher Locke, Andrea Canino, Nicolò Piluso, Andrea Severino, Antonino La Magna, Stephen E. Saddow, Francesco La Via
Abstract:SiC is a candidate material for micro- and nano-electromechanical systems (MEMS and NEMS). The fabrication of SiC MEMS-based sensors requires...
133
Authors: Bernard Enrico Watts, Giovanni Attolini, Tullo Besagni, Matteo Bosi, Claudio Ferrari, Francesca Rossi, Ferenc Riesz, Liu Di Jiang
Abstract:To assess deformation issues in SiC/Si, different pre-growth procedures were investigated, involving the addition of SiH4 to C3H8 during the...
137
Authors: Nicolò Piluso, Massimo Camarda, Ruggero Anzalone, Andrea Severino, Antonino La Magna, Giuseppe D'Arrigo, Francesco La Via
Abstract:Raman microscopy has been used to study the stress distribution on 3C-SiC/Si(100) micro-machined free standing structures. Linear scans along...
141
Authors: Yan Peng, Xian Gang Xu, Xiao Bo Hu, Xiu Fang Chen, Yu Qiang Gao
Abstract:Contactless resistivity mapping, scanning electron microscope (SEM) and confocal laser microscope have been used to study the relationship of...
145
Authors: Nikoletta Jegenyes, Georgios Manolis, Jean Lorenzzi, Veronique Soulière, Deborah Dompoint, Alexandre Boulle, Gabriel Ferro, Kęstutis Jarašiūnas
Abstract:Free carrier absorption (FCA) and picosecond light-induced transient grating (LITG) techniques were applied to study the photoelectrical...
153
Authors: Patrik Ščajev, A. Mekys, P. Malinovskis, Jurgis Storasta, Masashi Kato, Kęstutis Jarašiūnas
Abstract:The electrical and optical techniques have been applied for investigation of carrier transport and recombination features in thick...
157
Authors: Georgios Manolis, Milena Beshkova, Mikael Syväjärvi, Rositza Yakimova, Kęstutis Jarašiūnas
Abstract:We investigated non-equilibrium carrier dynamics in ~20μm thick 3C-SiC layers, grown by sublimation epitaxy directly on 6H-SiC substrate or...
161
Authors: Maya Marinova, Alkyoni Mantzari, Jian Wu Sun, Jean Lorenzzi, Ariadne Andreadou, Georgios Zoulis, Sandrine Juillaguet, Gabriel Ferro, Jean Camassel, Efstathios K. Polychroniadis
Abstract:The current communication focuses on the investigation of 3C-SiC layers grown by the Vapour-Liquid-Solid mechanism on on-axis Si-face 6H-SiC...
165
Showing 31 to 40 of 200 Paper Titles