Paper Title:
The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering
  Abstract

Hydrogen doped AZO films (HAZO) were prepared by RF magnetron sputtering. A systematic study of the effect of substrate to target distance (Dst) on the structural, electrical and optical properties of the as-grown HAZO films was carried out. Compared with the Al-doped ZnO films, the hydrogen in the atmosphere influenced the growth of the films by incorporating in the films and bombarding the surface of the film, namely, the Dst, which induced the residual stress and the roughness of the films decreased with an increase of the Dst. The films showed a smaller grain size. The surface work function of the films changed with the composition of the films, reaching a maximum at 7.5cm.

  Info
Periodical
Edited by
Kunyuan Gao, Shaoxiong Zhou, Xinqing Zhao
Pages
134-140
DOI
10.4028/www.scientific.net/MSF.685.134
Citation
W. M. Lu, J. Zhang, H. W. Diao, L. Zhao, W. J. Wang, "The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering", Materials Science Forum, Vol. 685, pp. 134-140, 2011
Online since
June 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Tae Hong Kim, Seung Yong Lee, Jang Sub Lee, Duk Il Suh, Nam Kyu Cho, Wook Bahng, Nam Kyun Kim, Sung Yong Choi, Hak Jong Kim, Sang Kwon Lee
Abstract:We investigated how surface roughness, intentionally induced by chemical-mechanical polishing, affects the formation of ohmic contacts to an...
717
Authors: Liang Huang, Yun Han Ling, Yu Qing Zhuo, Fu Jian Ren
Abstract:A dye-sensitized TiO2 nanotube array (DST) was fabricated by electrochemical anodization in an aqueous organic electrolyte and...
296
Authors: Pei Hao Li, Wen Jun Qu, Bo Jin
Chapter 12: Monitoring and Control of Structures
Abstract:To gain an insight into the protective mechanism of surface biodeposition, a theoretical study of carbon dioxide diffusion through...
3365
Authors: Pei Hao Li, Bo Jin
Chapter 1: Material Research in Mechanical Engineering, Industry and Manufacturing Engineering
Abstract:Chloride diffusuion is regarded as the dominant chloride transport process in concrete and the main cause of the corrosion of steel in...
107
Authors: Suree Tongwanichniyom, Nirun Witit-Anun
Chapter 2: Materials Science and Materials Physics
Abstract:Titanium dioxide (TiO2) nanothin films were deposited on unheated substrate, the glass slide and Si-wafer, by DC reactive...
370