Paper Title:
Analysis of ZAO Thin Films by DC Reaction Magnetron Sputtereing
  Abstract

The high quality ZAO thin films were produced by DC reaction magnetron sputtering technology. The XRD, electrical and optical properties of ZAO thin films were particularly investigated. The results show that ZAO films are polycrystalline hexagonal wurtzite structure,and Al2O3 crystal phase are not found. At the same time,the high quality ZAO films with the minimum resistivity of 4.5x×10-4Ω·㎝, the transmittance in visible region above 80% and the reflectivity in IR region above 70% are gained.

  Info
Periodical
Edited by
Chengming Li, Chengbao Jiang, Zhiyong Zhong and Yichun Zhou
Pages
585-590
DOI
10.4028/www.scientific.net/MSF.687.585
Citation
F. Lu, C. H. Xu, L. S. Wen, "Analysis of ZAO Thin Films by DC Reaction Magnetron Sputtereing", Materials Science Forum, Vol. 687, pp. 585-590, 2011
Online since
June 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Su Shia Lin, Jow Lay Huang
Abstract:A radio frequency power (rf) was supplied to ZnO target, and a direct current (dc) power was supplied to Al target for the preparation of...
305
Authors: Sang Moo Park, Takashi Tomemori, Tomoaki Ikegami, Kenji Ebihara
Abstract:High-quality transparent conductive Al-doped ZnO (AZO) thin films were deposited by pulsed laser deposition on quartz glass substrates at...
211
Authors: C.M. Mahajan, A.G. Godbole, S.P. Gumfekar, S.H. Sonawane, M.G. Takwale
Abstract:Nanocrystalline undoped and Al doped ZnO thin films were synthesized by the chemical spray pyrolysis of Zinc acetate and Aluminium chloride...
103
Authors: Wen Tsai Yen, Jia Hong Ke, Hsin Jung Wang, Yi Cheng Lin, Jung Lung Chiang
Abstract:This study investigates the effects of damp heat stability on the optoelectronic properties of ZnO:Al (AZO) and ZnO:Ga(GZO) films with...
923
Authors: M. Rajendraprasad Reddy, Mutsumi Sugiyama, K. T. Ramakrishna Reddy
Chapter 13: Thin Films
Abstract:Nickel-doped ZnO thin films with different Ni contents (0 - 15%) were deposited on glass substrate at 350°C by a spray pyrolysis technique....
1423