Paper Title:
Long Si3N4 Nanowires Fabricated by PECVD
  Abstract

The paper presents the fabrication of Si3N4 nanowires prepared on Si substrate by plasma-enhanced chemical vapor deposition (PECVD) technology. The nanowires were formed using silane (SiH4) and nitrogen (N2) as reactive gases under the action of Fe catalysts. They are characteristics of superlong straight and flexural types observed by field emission scanning electron microscopy (FESEM). The former with a length of 3.96 mm has smooth surface and uniform diameter resulting from an orientation growth process, while the latter is 5.20 mm formed by two nanowires twisted together with a squeezing growth way. A growth model has been developed for the formation of the nanowires, and the growth mechanism of the nanowires has been discussed. The straight and flexural Si3N4 nanowires can be used as nano-scaled bridge, spring, and cantilever in the fabrication of nano-machine systems.

  Info
Periodical
Edited by
Rongming Wang, Ying Wu and Xiaofeng Wu
Pages
85-89
DOI
10.4028/www.scientific.net/MSF.688.85
Citation
J. W. Song, X. Y. Ma, "Long Si3N4 Nanowires Fabricated by PECVD", Materials Science Forum, Vol. 688, pp. 85-89, 2011
Online since
June 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: X. Zhang, Seo Young Ha, M. Benamara, Marek Skowronski, Joseph J. Sumakeris, Sei Hyung Ryu, Michael J. Paisley, Michael J. O'Loughlin
Abstract:Structure of the “carrot” defects in 4H-SiC homoepitaxial layers deposited by CVD has been investigated by plan-view and cross-sectional...
327
Authors: Yong Yee Kim, Young Min Park, Hoy Yul Park, Hong Chae Park, Seog Young Yoon
Abstract:Monodispersed Cu powders were prepared in aqueous solution through a wet-reduction process with hydrazine hydrate (N2H4·H2O). In particular,...
2118
Authors: Ken Nishida, Minoru Osada, Shintaro Yokoyama, Takafumi Kamo, Takashi Fujisawa, Keisuke Saito, Hiroshi Funakubo, Takashi Katoda, Takashi Yamamoto
Abstract:Micro-patterned Pb(Zr,Ti)O3 (PZT) films with dot-pattern were grown by metal organic chemical vapor phase deposition (MOCVD). Micro-patterned...
135
Authors: Xue Tao Yuan, Dong Bai Sun, Zhi Qiang Hua, Lei Wang
Abstract:The growth morphology and structure of deposits during the initial stages of amorphous Ni-P electrodeposition was studied using atomic force...
535
Authors: Xiao Yu Zhang, Yu Jun Zhang, Hong Yu Gong, Yun Na Song
Chapter 12: Chemical Materials and Processes
Abstract:Sodium hexatitanate (Na2O•6TiO2) whiskers with an average diameter and aspect ratio of 1-3 µm and 10-20 respectively...
1339