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Sb Delta-Type Doping in Si-MBE Superlattices

Journal Materials Science Forum (Volume 69)
Volume Molecular Beam Epitaxy
Edited by G. Minchev and L. Pramatarova
Pages 17-20
DOI 10.4028/www.scientific.net/MSF.69.17
Citation Alexander I. Nikiforov et al., 1991, Materials Science Forum, 69, 17
Authors Alexander I. Nikiforov, B.Z. Kanter, S.I. Stenin, S.V. Rubanov
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