The Liquid Metal Ion Source for Molecular Beam Epitaxy of Silicon |
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| Journal | Materials Science Forum (Volume 69) |
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| Volume | Molecular Beam Epitaxy |
| Edited by | G. Minchev and L. Pramatarova |
| Pages | 61-64 |
| DOI | 10.4028/www.scientific.net/MSF.69.61 |
| Citation | V. Avrutin et al., 1991, Materials Science Forum, 69, 61 |
| Authors | V. Avrutin, A.F. Vyatkin |
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