Paper Title:
The Liquid Metal Ion Source for Molecular Beam Epitaxy of Silicon
  Abstract

  Info
Periodical
Edited by
G. Minchev and L. Pramatarova
Pages
61-64
DOI
10.4028/www.scientific.net/MSF.69.61
Citation
V. Avrutin, A.F. Vyatkin, "The Liquid Metal Ion Source for Molecular Beam Epitaxy of Silicon ", Materials Science Forum, Vol. 69, pp. 61-64, 1991
Online since
January 1991
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Price
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