Paper Title:

A Micro Triggered Spark Gap Switch with Three Electrodes

Periodical Materials Science Forum (Volume 694)
Main Theme Frontier of Nanoscience and Technology
Edited by Ran Chen
Pages 485-489
DOI 10.4028/www.scientific.net/MSF.694.485
Citation Hui Shen et al., 2011, Materials Science Forum, 694, 485
Online since July, 2011
Authors Hui Shen, Gui Fu Ding, Zhen Wei Zhou, Zhuo Qing Yang, Xue Mei Cui
Keywords Breakdown Voltage, Gas Discharge, Spark Gap Switch, Surface Micromachining
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Abstract

A planar micro triggered spark gap switch with three electrodes was designed and fabricated based on non-silicon surface micromachining technology. It consists of two main electrodes, the shape of which is semicircle, and a triggering electrode which is a thin strip. The gap distance between two main electrodes is 800μm. Benefitting from MEMS technology, the switch is integratable and its cost has the potential to be reduced. The designed switch has been optimized and tested. It gives out a pulse current with peak of 5165.21A and 129.6ns rise time. The test data has an agreement with the simulation results.