Paper Title:
A Micro Triggered Spark Gap Switch with Three Electrodes
  Abstract

A planar micro triggered spark gap switch with three electrodes was designed and fabricated based on non-silicon surface micromachining technology. It consists of two main electrodes, the shape of which is semicircle, and a triggering electrode which is a thin strip. The gap distance between two main electrodes is 800μm. Benefitting from MEMS technology, the switch is integratable and its cost has the potential to be reduced. The designed switch has been optimized and tested. It gives out a pulse current with peak of 5165.21A and 129.6ns rise time. The test data has an agreement with the simulation results.

  Info
Periodical
Chapter
Chapter 2: Frontiers of Materials Science and Engineering
Edited by
Ran Chen
Pages
485-489
DOI
10.4028/www.scientific.net/MSF.694.485
Citation
H. Shen, G. F. Ding, Z. W. Zhou, Z. Q. Yang, X. M. Cui, "A Micro Triggered Spark Gap Switch with Three Electrodes", Materials Science Forum, Vol. 694, pp. 485-489, 2011
Online since
July 2011
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Price
$32.00
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