Paper Title:
Design and Fabrication of Low-Power Planar Type Gas Sensor
  Abstract

In this paper we describe the fabrication steps and the implementation of a planar type gas sensing applications with suspended structure, which presents very low power consumption. Simulations with the finite element model tool show homogeneous temperature distribution across the sensitive film. The device attached with a spin-coated thin layer of SnO2 showed a reasonable sensing performance to hydrogen.

  Info
Periodical
Chapter
Chapter 2: Frontiers of Materials Science and Engineering
Edited by
Ran Chen
Pages
580-584
DOI
10.4028/www.scientific.net/MSF.694.580
Citation
Z. L. Zhang, C. B. Yin, C. M. Tao, B. Zhu, "Design and Fabrication of Low-Power Planar Type Gas Sensor", Materials Science Forum, Vol. 694, pp. 580-584, 2011
Online since
July 2011
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