The three kind of oxides such as 3Y-ZrO2, Fe2O3 and MgO were used as catalyst in reaction bonded silicon nitride (RBSN) with low-purity silicon powder as raw materials. The oxides can strongly promoted the nitridation ratio of RBSN, and the catalysis effects of these oxides for RBSN were investigated. After 4h nitridation, the degree of nitridation increased from 43% to 96% by adding 10wt% of 3Y-ZrO2 additive comparing with the sample without additive, and the catalystic effects of Fe2O3 and MgO were slightly less than 3Y-ZrO2 additive. XRD patterns revealed that the main phases of the reaction products were α-Si3N4, β-Si3N4 and Si-N-O intermediation. SEM micrographs show that the hexagonal columnar β-Si3N4 separated from acicular α-Si3N4.