The micro growth process and characteristics of deposited material in micro EDM deposition are researched in this paper. In the initial stage of the deposition the deposited material is not an even layer in the diameter direction of tool electrode. The emergence of deposited material will affect the next pulse discharge distribution between tool electrode and workpiece. A micro cylinder with the diameter of 85µm, height of 255µm formed successfully with the fine surface quality using the tool electrode diameter of 200µm. It has shown that micro EDM deposition process has the ability to fabrication more finer micro structures with thinner electrode. The characteristics of deposited material including bonding behavior between deposited material and workpiece, energy spectrum analysis, hardness test and resist compression test of the deposited material have been tested. Results show that the deposited material has compact microstructure and bonds close to the workpiece, which can be used in the occasion of withstanding compress.