Paper Title:
Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery
  Abstract

In this paper, we present our ongoing work on developing a microfabricated XYZ stage-needle arrayed single crystal silicon (SCS) structure for cellular delivery and surgery. We discuss the device design and working principle based on electrostatic actuation. We also briefly discuss our microfabrication process flow and show some preliminary results of fabricating arrays of microneedles that are 250 µm long and 5 µm at the tip diameter.

  Info
Periodical
Edited by
B. J. Ruck and T. Kemmitt
Pages
195-198
DOI
10.4028/www.scientific.net/MSF.700.195
Citation
A. S. Banerjee, R. Blaikie, W. H. Wang, "Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery", Materials Science Forum, Vol. 700, pp. 195-198, 2012
Online since
September 2011
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