Formation of Nanovoids in Femtosecond Laser-Irradiated Single Crystals of Silicon Carbide

Okada, Tatsuya; Tomita, Takuro; Matsuo, Shigeki; Hashimoto, Shuichi; Kashino, Ryota; Ito, Takuto

Paper Titles

Imaging and Strain Analysis of Threading-Edge and Basal-Plane Dislocations in 4H-SiC Using X-Ray Three-Dimensional Topography, p.3
Threading Dislocations in 4H-SiC Observed by Double-Crystal X-Ray Topography, p.7
Characterization of Dislocation Structures in Hexagonal SiC by Transmission Electron Microscopy, p.11
Photoluminescence Imaging and Wavelength Analysis of Basal Plane Frank-Type Defects in 4H-SiC Epilayers, p.15
Formation of Nanovoids in Femtosecond Laser-Irradiated Single Crystals of Silicon Carbide, p.19
Electron Beam Induced Current Observation of Dislocations in 4H-SiC Introduced by Mechanical Polishing, p.23
Basal Plane Dislocations in 4H-SiC Epilayers with Different Dopings, p.27
Frank Partial Dislocation in 4H-SiC Epitaxial Layer by MSE Method, p.31
Separation of the Driving Force and Radiation-Enhanced Dislocation Glide in 4H-SiC, p.35

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Paper Title:

Formation of Nanovoids in Femtosecond Laser-Irradiated Single Crystals of Silicon Carbide

Periodical	Materials Science Forum (Volume 725)
Main Theme	Defects-Recognition, Imaging and Physics in Semiconductors XIV
Edited by	Hiroshi Yamada-Kaneta and Akira Sakai
Pages	19-22
DOI	10.4028/www.scientific.net/MSF.725.19
Citation	Tatsuya Okada et al., 2012, Materials Science Forum, 725, 19
Online since	July, 2012
Authors	Tatsuya Okada, Takuro Tomita, Shigeki Matsuo, Shuichi Hashimoto, Ryota Kashino, Takuto Ito
Keywords	Femtosecond Laser, Nanovoid, Silicon Carbide (SiC)
Price	US$ 28,-

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Abstract

Scanning transmission electron microscopy was carried out to study the three-dimensional microstructures of periodic strained layers induced by the irradiation of femtosecond laser pulses inside a silicon carbide single crystal. The cross section of laser-irradiated line consisted of a shell-shaped modified region surrounding a core region with no modification. The laser-modified region was composed of strained layers with a typical spacing of 200 nm. Nanovoids from 10 nm to 20 nm in diameter were observed. Three-dimensional tomographic images clearly show the plate-like shape of strained layers extending parallel to the electric field of the laser light and the random distribution of nanovoids in the strained layers. The three-dimensional observation provides insight into the formation mechanisms of periodic microstructures.