Paper Title:
XRD Characterization of Sputtered Mo and W Thin Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 79-82)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
647-652
DOI
10.4028/www.scientific.net/MSF.79-82.647
Citation
J.L.C. Daams, T.J. Vink, M. A.J. Somers, A.G. Dirks, "XRD Characterization of Sputtered Mo and W Thin Films", Materials Science Forum, Vols. 79-82, pp. 647-652, 1991
Online since
January 1991
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Price
$32.00
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