Paper Title:
Texture and Lattice Strain Determination of Molybdenum Thin Films Deposited by D.C. Magnetron Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 79-82)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
653-658
DOI
10.4028/www.scientific.net/MSF.79-82.653
Citation
P. Gergaud, P. Bosland, J.J. Bacmann, J. L. Lebrun, "Texture and Lattice Strain Determination of Molybdenum Thin Films Deposited by D.C. Magnetron Sputtering", Materials Science Forum, Vols. 79-82, pp. 653-658, 1991
Online since
January 1991
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