Paper Title:
Hydrogen Loss and Interdiffusion in Amorphous Si/SiC Multlayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 79-82)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
887-892
DOI
10.4028/www.scientific.net/MSF.79-82.887
Citation
G. Zorn, J. Kolodzey, H. Göbel, T. Fischer, P. Hanesch, R. Schwarz, "Hydrogen Loss and Interdiffusion in Amorphous Si/SiC Multlayers", Materials Science Forum, Vols. 79-82, pp. 887-892, 1991
Online since
January 1991
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Price
$32.00
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