Hydrogen Loss and Interdiffusion in Amorphous Si/SiC Multlayers |
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| Journal | Materials Science Forum (Volumes 79 - 82) |
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| Volume | European Powder Diffraction |
| Edited by | R. Delhez and E.J. Mittemeijer |
| Pages | 887-892 |
| DOI | 10.4028/www.scientific.net/MSF.79-82.887 |
| Citation | G. Zorn et al., 1991, Materials Science Forum, 79-82, 887 |
| Authors | G. Zorn, J. Kolodzey, H. Göbel, T. Fischer, P. Hanesch, R. Schwarz |
| Full Paper | 
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