Observation of Annealing Effects in Ti/TiN-Diffusion Barriers using High-Temperature X-Ray Diffraction |
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| Journal | Materials Science Forum (Volumes 79 - 82) |
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| Volume | European Powder Diffraction |
| Edited by | R. Delhez and E.J. Mittemeijer |
| Pages | 893-902 |
| DOI | 10.4028/www.scientific.net/MSF.79-82.893 |
| Citation | G. Zorn et al., 1991, Materials Science Forum, 79-82, 893 |
| Authors | G. Zorn, H. Joswig |
| Full Paper | 
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