Paper Title:
Observation of Annealing Effects in Ti/TiN-Diffusion Barriers using High-Temperature X-Ray Diffraction
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 79-82)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
893-902
DOI
10.4028/www.scientific.net/MSF.79-82.893
Citation
G. Zorn, H. Joswig, "Observation of Annealing Effects in Ti/TiN-Diffusion Barriers using High-Temperature X-Ray Diffraction", Materials Science Forum, Vols. 79-82, pp. 893-902, 1991
Online since
January 1991
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Price
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