Paper Title:
Depth Profiles for Hydrogen-Assisted Thermal Donor Formation in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
105-110
DOI
10.4028/www.scientific.net/MSF.83-87.105
Citation
H.J. Stein, S.K. Hahn, P.M. Richards, "Depth Profiles for Hydrogen-Assisted Thermal Donor Formation in Silicon", Materials Science Forum, Vols. 83-87, pp. 105-110, 1992
Online since
January 1992
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Price
$32.00
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