Paper Title:
Anomalous Damage Depths in Low-Energy Ion Beam Processed III-V Semiconductors
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
1439-1444
DOI
10.4028/www.scientific.net/MSF.83-87.1439
Citation
S. J. Pearton, F. Ren, T.R. Fullowan, R.F. Kopf, W.S. Hobson, C.R. Abernathy, A. Katz, U.K. Chakrabarti, V. Swaminathan, "Anomalous Damage Depths in Low-Energy Ion Beam Processed III-V Semiconductors", Materials Science Forum, Vols. 83-87, pp. 1439-1444, 1992
Online since
January 1992
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Price
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