Paper Title:
Photoluminescence Characterisation of the Silicon Surface Exposed to Plasma Treatment
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
1445-1450
DOI
10.4028/www.scientific.net/MSF.83-87.1445
Citation
A. Henry, B. Monemar, J. L. Lindström, T.D. Bestwick, G.S. Oehrlein, "Photoluminescence Characterisation of the Silicon Surface Exposed to Plasma Treatment", Materials Science Forum, Vols. 83-87, pp. 1445-1450, 1992
Online since
January 1992
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Price
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