Paper Title:
Study of Internal Oxide Gettering for CZ Silicon: Effects of Oxide Particle Size and Number Density and Assessment of Thermal Stability of Gettering for Copper and Nickel
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Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
1469-1474
DOI
10.4028/www.scientific.net/MSF.83-87.1469
Citation
Z. Laczik, G.R. Booker, R. J. Falster, P. Török, "Study of Internal Oxide Gettering for CZ Silicon: Effects of Oxide Particle Size and Number Density and Assessment of Thermal Stability of Gettering for Copper and Nickel", Materials Science Forum, Vols. 83-87, pp. 1469-1474, 1992
Online since
January 1992
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Price
$32.00
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