Paper Title:
Morphology Change of Oxygen Precipitates in Cz-Si Wafers during Two-Step Heat-Treatment
  Abstract

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Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
1475-1480
DOI
10.4028/www.scientific.net/MSF.83-87.1475
Citation
M. Hasebe, J. W. Corbett, K. Kawakami, "Morphology Change of Oxygen Precipitates in Cz-Si Wafers during Two-Step Heat-Treatment", Materials Science Forum, Vols. 83-87, pp. 1475-1480, 1992
Online since
January 1992
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