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Annealing of Damage in GaAs and InP after Implantation of Cd and In

Journal Materials Science Forum (Volumes 83 - 87)
Volume Defects in Semiconductors 16
Edited by Gordon Davies, G.G. DeLeo and M. Stavola
Pages 1481-1486
DOI 10.4028/www.scientific.net/MSF.83-87.1481
Citation Wulf Pfeiffer et al., 1992, Materials Science Forum, 83-87, 1481
Authors Wulf Pfeiffer, Manfred Deicher, R. Kalish, R. Keller, R. Magerle, N. Moriya, P. Pross, H. Skudlik, Th. Wichert, Herbert Wolf
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