Paper Title:
High Temperature Defect-Free Rapid Thermal Annealing of III-V Substrates in Metallorganic Controlled Ambient
  Abstract

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Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
1509-1518
DOI
10.4028/www.scientific.net/MSF.83-87.1509
Citation
A. Katz, A. Feingold, S. J. Pearton, M. Geva, S. Nakahara, E. Lane, "High Temperature Defect-Free Rapid Thermal Annealing of III-V Substrates in Metallorganic Controlled Ambient", Materials Science Forum, Vols. 83-87, pp. 1509-1518, 1992
Online since
January 1992
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