High Temperature Defect-Free Rapid Thermal Annealing of III-V Substrates in Metallorganic Controlled Ambient |
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| Journal | Materials Science Forum (Volumes 83 - 87) |
|---|---|
| Volume | Defects in Semiconductors 16 |
| Edited by | Gordon Davies, G.G. DeLeo and M. Stavola |
| Pages | 1509-1518 |
| DOI | 10.4028/www.scientific.net/MSF.83-87.1509 |
| Citation | A. Katz et al., 1992, Materials Science Forum, 83-87, 1509 |
| Authors | A. Katz, A. Feingold, S.J. Pearton, M. Geva, S. Nakahara, E. Lane |
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