Paper Title:
Gettering of Copper and Iron to Extended Surface Defects in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
185-190
DOI
10.4028/www.scientific.net/MSF.83-87.185
Citation
M.D. de Coteau, P. R. Wilshaw, R. J. Falster, "Gettering of Copper and Iron to Extended Surface Defects in Silicon", Materials Science Forum, Vols. 83-87, pp. 185-190, 1992
Online since
January 1992
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Price
$32.00
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