Paper Title:
Electrical and Optical Properties of Titanium, Molybdenum and Tungsten Related Defects in Silicon
  Abstract

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Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
239-244
DOI
10.4028/www.scientific.net/MSF.83-87.239
Citation
K. Schmalz, H. G. Grimmeiss, H. Pettersson, L. Tilly, K. Tittelbach, "Electrical and Optical Properties of Titanium, Molybdenum and Tungsten Related Defects in Silicon", Materials Science Forum, Vols. 83-87, pp. 239-244, 1992
Online since
January 1992
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Price
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