Paper Title:
On the Determination of Nitrogen in Czochralski Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
263-268
DOI
10.4028/www.scientific.net/MSF.83-87.263
Citation
M.W. Qi, T.S. Shi, S.S. Tan, B. Zhu, P. Cai, L. Q. Liu, D. L. Que, L.B. Li, "On the Determination of Nitrogen in Czochralski Silicon", Materials Science Forum, Vols. 83-87, pp. 263-268, 1992
Online since
January 1992
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Price
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