Paper Title:
Defect Distribution in Large CZ-Silicon Wafers Investigated by Positron Annihilation Spectroscopy
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Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
413-418
DOI
10.4028/www.scientific.net/MSF.83-87.413
Citation
P. Mascher, W. Puff, S.K. Hahn, K.H. Cho, B.Y. Lee, "Defect Distribution in Large CZ-Silicon Wafers Investigated by Positron Annihilation Spectroscopy", Materials Science Forum, Vols. 83-87, pp. 413-418, 1992
Online since
January 1992
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