Effect of Multiple Trapping on Hydrogen Diffusion in Silicon |
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| Journal | Materials Science Forum (Volumes 83 - 87) |
|---|---|
| Volume | Defects in Semiconductors 16 |
| Edited by | Gordon Davies, G.G. DeLeo and M. Stavola |
| Pages | 51-56 |
| DOI | 10.4028/www.scientific.net/MSF.83-87.51 |
| Citation | Jeffrey T. Borenstein et al., 1992, Materials Science Forum, 83-87, 51 |
| Authors | Jeffrey T. Borenstein, James W. Corbett, S.J. Pearton |
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