Paper Title:
Unintentional Hydrogenation of III-V Semiconductors during Device Processing
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
617-622
DOI
10.4028/www.scientific.net/MSF.83-87.617
Citation
S. J. Pearton, C.R. Abernathy, W.S. Hobson, U.K. Chakrabarti, J. Lopata, D.M. Kozuch, M. Stavola, "Unintentional Hydrogenation of III-V Semiconductors during Device Processing", Materials Science Forum, Vols. 83-87, pp. 617-622, 1992
Online since
January 1992
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Price
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