Paper Title:
Measurements of the Diffusion Coefficient of Hydrogen in Silicon Monitored by Catalyzed Enhanced Oxygen Diffusion Jumps
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Periodical
Materials Science Forum (Volumes 83-87)
Edited by
Gordon Davies, G.G. DeLeo and M. Stavola
Pages
87-92
DOI
10.4028/www.scientific.net/MSF.83-87.87
Citation
R.C. Newman, J.H. Tucker, S.A. McQuaid, "Measurements of the Diffusion Coefficient of Hydrogen in Silicon Monitored by Catalyzed Enhanced Oxygen Diffusion Jumps", Materials Science Forum, Vols. 83-87, pp. 87-92, 1992
Online since
January 1992
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