Paper Title:
Correlation between Grain Growth and Hillock Growth in Thin Thermally Annealed Al-1%Si Films on Silicon Substrates
  Abstract

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Periodical
Materials Science Forum (Volumes 94-96)
Edited by
G. Abbruzzese and P. Brozzo
Pages
557-562
DOI
10.4028/www.scientific.net/MSF.94-96.557
Citation
D. Gerth, D. Katzer, R. Schwarzer, "Correlation between Grain Growth and Hillock Growth in Thin Thermally Annealed Al-1%Si Films on Silicon Substrates ", Materials Science Forum, Vols. 94-96, pp. 557-562, 1992
Online since
January 1992
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