Papers by keyword «Oxidation» and «Reliability»
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Influence of the Oxidation Temperature and Atmosphere on the Reliability of Thick Gate Oxides on the 4H-SiC C(000-1) Face
Authors: Michael Grieb, D. Peters, Anton J. Bauer, Peter Friedrichs, Heiner Ryssel
Keywords: (000-1), 4H SiC, C-Face, Constant-Current-Stress, Oxidation, Oxide Breakdown, Reliability, Time-Dependent-Dielectric-Breakdown(TDDB)
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