Papers by keyword «RBS»
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Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Authors: M. Kanaya, Hirokatsu Yashiro, Noboru Ohtani, Masakazu Katsuno, J. Takahashi, S. Shinoyama
Keywords: Cross-Sectional Transmission Electron Microscopy, Oxidation, Polishing, RBS, Surface Damage
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Photoluminescence and Backscattering Characterization of 6H SiC Implanted with Erbium and Oxygen Ions
Authors: A. Kozanecki, C. Jeynes, Brian J. Sealy, W. Jantsch, S. Lanzerstorfer, W. Heiß, G. Prechtl
Keywords: Erbium Centres, Ion Implantation, Photoluminescence (PL), RBS
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Investigation of Ion-Impantation Induced Damage in 6H-SiC by RSB/C and PAS
Authors: H. Wirth, W. Anwand, Gerhard Brauer, M. Voelskow, D. Panknin, Wolfgang Skorupa, Paul G. Coleman
Keywords: Ion Implantation, Positron Annihilation Spectroscopy, Radiation Damage, RBS, Substrate Temperature
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Analysis of Aluminium Ion Implantation Damage into 6H-SiC Epilayers
Authors: Narcis Mestres, M. Ben El Mekki, F.J. Campos, Jordi Pascual, Erwan Morvan, Phillippe Godignon, José Millán, G. Lulli
Keywords: Ion Implantation, Raman, RBS, SIMS, Simulation
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Phase Formation Sequence of Nickel Silicides from Rapid Thermal Annealing of Ni on 4H-SiC
Authors: Lynnette D. Madsen, Erik B. Svedberg, H.H. Radamson, Christer Hallin, B. Hjörvarsson, C. Cabral, J.L. Jordan-Sweet, C. Lavoie
Keywords: Annealing, Atomic Force Microscopy (AFM), Contact Resistivity, Metallization, Nickel Ni, RBS, RTA, Surface Morphology, Synchrotron, X-Ray Diffraction (XRD)
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Nuclear Transmutation Doping of Phosphorus into 6H-SiC
Authors: S. Tamura, Tsunenobu Kimoto, Hiroyuki Matsunami, M. Okada, S. Kanazawa, I. Kimura
Keywords: Annealing, Deep Level Analysis, Electrical Characteristics, Nuclear Transmutation Doping, Phosphorus, PL, RBS
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Damage Evolution in Al-implanted 4H SiC
Authors: Anders Hallén, P.O.Å. Persson, Andrej Yu. Kuznetsov, L. Hultman, B.G. Svensson
Keywords: Annealing, Channeling, Defect Kinetics, Dose Dependence, Implantation Temperature, RBS, Self-Interstitials, Transmission Electron Microscopy (TEM), Vacancy
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Low Resistance Ohmic Contacts to n-SiC Using Niobium
Authors: T.N. Oder, John R. Williams, K.W. Bryant, M.J. Bozack, John Crofton
Keywords: Niobium, 'non-reacted' Ohmic Contact, RBS, Specific Contact Resistance, X-Ray Photoelectron Spectroscopy (XPS)
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Diffusion of Substitutional Solutes in α-Ti Measured by RBS and HIRBS
Authors: M.L. Mirassou, Rodolfo A. Pérez, Fanny Dyment
Keywords: Diffusion, HIRBS, RBS, Substitutional Solutes, α-Ti
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Effect of Residual Damage on Carrier Transport Properties in a 4H-SiC Double Implanted Bipolar Junction Transistor
Authors: S. Ortolland, Nicolas G. Wright, C. Mark Johnson, A.P. Knights, Paul G. Coleman, C.P. Burrows, A.J. Pidduck
Keywords: Annealing, Atomic Force Microscopy (AFM), Bipolar Junction Transistor, Bipolar Transistor, Implantation, PAS, RBS
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