Materials Science & Technology

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CONFERENCE
9/7/2009 - 9/10/2009
6/28/2009 - 7/3/2009

Reactive UHV Sputtering and Structural Characterization of Epitaxial AlN and 6H-SiC(0001) Thin Films

Papers by keyword «Reactive UHV Sputtering and Structural Characterization of Epitaxial AlN» and «6H-SiC(0001) Thin Films»

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