Ion Implantation in Semiconductors
Solid State Phenomena Volumes 1 - 2
doi:10.4028/www.scientific.net/SSP.1-2
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p1
Characterization of Ion-Implanted Heavily-Doped Silicon by Optical Reflection
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393 K
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Authors: A. Borghesi, G. Guizzetti, L. Nosenzo
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p11
Modeling of Oxygen Depth Profiles in High Dose Oxygen-Implanted Silicon
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941 K
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Authors: H. Jaeger
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p33
Channeling, RBS and Mössbauer Measurements on 151Eu Implanted Si
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474 K
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Authors: A. Bhagawat, M.B. Kurup, K.G. Prasad, R.P. Sharma
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p45
Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon
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1 M
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Authors: Lih Juann Chen, C.W. Nieh, Chih Hsing Chu
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p59
EBIC-Investigation of the Dislocation-Impurity Interaction in Silicon
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323 K
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Authors: I.E. Bondarenko, E.B. Yakimov
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p65
Dopant Anomalous Diffusion Induced in Silicon by Ion Implantation
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940 K
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Authors: Sandro Solmi, Marco Servidori
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p85
Electrical Characterization of Buried Layers in Silicon
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942 K
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Authors: Wolfgang R. Fahrner, E. Klausmann
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p115
Mechanism of Buried Oxide Formation by Implanted Oxygen
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1 M
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Authors: J. Stoemenos
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p133
Diffusion of Ion-Implanted Group III and V Impurities in SlO2
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890 K
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Authors: A.H. Van Ommen
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p153
Annealing of Implants Reduces Lattice Defects and 1/f Noise
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220 K
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Authors: L.K.J. Vandamme
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p159
Formation and Optimization of Shallow Junctions by Ion Implantation and Rapid Thermal Annealing for CMOS Application
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478 K
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Authors: I Wei Wu
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p169
Fabrication of Nanometer Doping Structures by Secondary Implantation
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310 K
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Authors: H. Jorke
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p177
The Use of Ion Implantation for Lifetime Control in Silicon Devices
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318 K
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Authors: A. Mogro-Campero
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p187
Silicon Surface and Interface Damage Studies Using Ion Implantation
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318 K
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Authors: S. Ashok
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p195
Recoil Implantation for Shallow Junction Formation in Silicon
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255 K
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Authors: Harry L. Kwok