Paper Title:
Mechanism of Buried Oxide Formation by Implanted Oxygen
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 1-2)
Edited by
D. Stievenard and J.C. Bourgoin
Pages
115-131
DOI
10.4028/www.scientific.net/SSP.1-2.115
Citation
J. Stoemenos, "Mechanism of Buried Oxide Formation by Implanted Oxygen", Solid State Phenomena, Vols. 1-2, pp. 115-131, 1988
Online since
January 1991
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Price
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