Paper Title:
Diffusion of Ion-Implanted Group III and V Impurities in SlO2
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 1-2)
Edited by
D. Stievenard and J.C. Bourgoin
Pages
133-152
DOI
10.4028/www.scientific.net/SSP.1-2.133
Citation
A.H. Van Ommen, "Diffusion of Ion-Implanted Group III and V Impurities in SlO2", Solid State Phenomena, Vols. 1-2, pp. 133-152, 1988
Online since
January 1991
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Price
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