Paper Title:
Fabrication of Nanometer Doping Structures by Secondary Implantation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 1-2)
Edited by
D. Stievenard and J.C. Bourgoin
Pages
169-175
DOI
10.4028/www.scientific.net/SSP.1-2.169
Citation
H. Jorke, "Fabrication of Nanometer Doping Structures by Secondary Implantation", Solid State Phenomena, Vols. 1-2, pp. 169-175, 1988
Online since
January 1991
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Price
$32.00
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